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Pulnix TMC-73M Single Chip Miniature Industrial high quality NTSC camera
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LMDC Vacuum Equipment Page
1m3 = 35.32 ft3 = 1000 Liters,   1 torr = 1000 microns = 133 pascals = 1.333 mbar = 1 mm mercury, 1 Atmosphere = 760 torr = 1013 mbar,   1BTU = 78.2 ft-lb = 1054.9 Joules

Sputter Systems:   Vertical In-Line, Circular and others,
6" Roll to Roll Vacuum Deposition System
Chambers, Vacuum Ovens, Bell Jars
Pumps & Stacks:  DRY,WET,OILLESS,TURBO, CRYO, SCROLL
Valves: ISO, KF, UHV, SLIT, GATE
Instruments & Gages: PRESSURE, FLOW
Gas Management: MASS FLOW CONTROLLERS, FLOW METERS, REGULATORS, VALVES
Power Supplies: DC, AC, LF, HF, RF
Premium CoAxCables: HN, N, SQS, 7/16, Teflon Cable

	Ready to abate, burn, or scrub toxic gases and plasma reaction products at the vacuum chamber outlet port ? ETC 2D Dry Scrub System (used) Electrochemical Technology Corporation, Newark, CA Abatement for LPCVD and PECVD processess to waste solids. http://www.dryscrub.com/faq.html Includes:19" Mounting Rack Chamber and Electrode with RF Power Supply Electrode Surface Area > 4M^2 Solid Waste Volume > 2,000 cm^2 Wide Operating Pressure 0.12 to 10 Torr
	Hoecrst Calanese,    aka -Semiconductor Safety Technology    aka - Guardian Burn Box (used) Guardian Burn Box: - aka "Gas Scrubber" for Toxic Gas Abatement. Includes: Flame based Burn Box Gas Abatement System Labels list: NF3, H2, and Silane Note: burn-boxes require expert attention before use.

	AKT 1600 PECVD Gen 2.5 PECVD Systems, Refurbished, Guaranteed  Generic 400x500mm.  Configured for 370x470mm. Superb Manufacturing or R&D Platform. ACL - Atmospheric Cassette Load (Clean Room Robot module) Transport module with heater (1) and VCE units (2) Process Module Chambers (up to 4, total) Gas Control Modules Pumps (optional) Installation and Run-Up (optional) Abatement and Facilities installation (optional)	Pricing according to customer requirement and specification
	AKT 4300 PVD Gen 3.5 Scanning Magnet PVD/Sputter Process Chambers Generic 600x720mm.  Superb Process Platform. Includes: Stainless Process Chamber (2) for PVD (sputter) Scanning Magnet Deasign Target mounts on Ti Backing plate Accessories: - Gun-Drilled Backing plates, Various targets and target materials for various applicattions. Size Diagram (gif)
	AKT 4300 PVD Accessories Overhead Maintenance Hoist for target and backing plate changes. AKT Backing Plates - Three Piece Gun-Drilled Ti Backing plates Various Traget materials
	AKT 1600 PVD Gen 2.5 Scanning Magnet PVD/Sputter Process Chambers Generic 400x500mm.  Configured for 370x470mm. Choice of Aluminum or Stainless Process Chambers
	AKT 1600 PVD Accessories Overhead Hoist for maintenance and target and backing plate changes. AKT Backing Plates - Three Piece Gun-Drilled Ti Backing plates Various Traget materials

Cluster-Tool Robot SUBSTRATE/WAFER
High-Vacuum Transfer Systems
for - Semiconductor, Flat Panel, Battery Substrates & Many Other
5", 6", 8" Rounds up to 720 x 920mm Rectangle

BROOKS MODEL 15800-5
4 sided transfer hub with robot $6750

EQUIPE:

EFEM 150/200 4 position Cassette -To-Cassette Manager
1 - Equipe Cassette to Chamber robot on linear track
accessing 4 cassette stations.
2 - Equipe Pre-Alginer
Price $40K  (not shown)

CLUSTER HUB, 6 Sided, 200mm,
Includes EQUIPE Robot and Controls.
Price $60K  (not shown)

HEINE 
6 side cluster hub for 200mm wafers,
Usable process positions = 4
plus loadlock air-lock LOAD/UNLOAD with two vacuum cassette elevator stations
in Cleanroom Bulkhead.
Price $25K 

BROOKS Model 7500 8" Wafer Transfer Systems (2)
MAG-7 Robot and Arms in Hex Chamber
Optional optical wafer sensors. 
Substrates 200x200mm glass or metal .
Chamber Heater on one unit
Accepts VAT Valves (standard issue)

   

 

BROOKS 620x750mm "Hercules" Cluster Tool Set
Heater Chamber up to 500C
Two VCE (holds 20 substrates) Chambers
UNUSED, New in Crate, Ready To install
Transfer Robot: Third Generation Brooks MAG-Tran 70A.  Very Reliable !
Dual-ended effector arms for greater throughput
Substrate Size = Gen 3.5 (up to  620x750mm)
Slit Valve (VAT) Chamber Openings 650mm wide x 80mm high
SUPPORT World-wide by Brooks-Trained Service Techs.
IMAGES:  Transfer chamber 3 views, VCE and Heater (with Mike) Chambers
*note: Requires Vacuum Pumps appropriate to your process gasses and pressure regeime - Hi Vacuum to LPCVD pressures.

   

   


BUILDING SOME MAGNETRON CATHODES ?
Here is rare opportunity to purchase components for cathodes at reasonable pricing:
Copper Backing Plates (8): Manufactured By ULVAC:   920mm x 232mm x 22.5 mm
Magnetron Mag Packs, Unused:  Edge-to-Edge Magnet structure = 884mm x 120mm
Kit: Adjustable Distance Mag Pack and Backing Plate (for target utilization experiments)
Price = $4400
Kit: Fixed Distance Mag Pack and Backing Plate (not adjustable, but identical magnet structure)
Price = $3500

VERTICAL IN-LINE, DOUBLE-SIDE CAPABLE
Coating Systems - for Sputter, PVD, and PECVD
. . technology evolved for uniformity and precision .

SOLAREX/BP SOLAR Inline System by MECH-L,
Vertical In-Line Dual Side Capable Sputter System:
Chambers (5 total)
       INTERIOR HEIGHT = 36.375" (924mm)
       INTERNAL LENGTH [valve face] - [valve face] = [ 68.5" (1740mm)]
       INTERNAL LENGTH [chamber end] - [chamber end] = [ 64.25" (1632mm)]
       Maximum Cathode height mechanically available = 900mm
  1  LOAD         (eg: Loadlock + Buffer/Heat/Clean)
  2  Process 1   (eg: Buffer/Heat/Clean)
  3  Process 2   (eg: Sputter 1)
  4  Process 3   (eg: Sputter 2)
  5  UNLOAD     (Cool and unloadlock)

Slit Valves = 6" x 32" (150x800mm)
Door Openings = 34.625" x 60.5"
Doors = 38"H x 63.625"L x 0.875"thick
Installed Targets = 31" (787mm) Height
Substrate Sizes = ... as large as 675x1600mm
Installed Carriers = 31.5"H x 61"L

Images below: 
System in place:  R & L side views
Process Chamber Open, ... Closed, Open Chamber Door Inside View
Cabinet containing PLC, I/O, and Transport Motor Drives

 

      



 


SPUTTER DEPOSITION SYSTEM: Balzers DZA-750
Vertical In-Line, (up to 3 large target) Single-Side Pass-Through Sputter system.
Diffusion pumped. Originally for ITO.  Serial # BSS02251/102.

Vacuum Components
Slit valves: Four units by VAT, approximately 750x150mm, Pneumatic., 2 at each load/unload chamber
Mechanical Pumps: Two Leybold D90A+WAP500, one on load-lock on each end.
Diffusion pumps: Three Balzers DFA320
Turbo: TPH 060 Pump, with TCP 121 Control,
MFCs: and controls.
RGA: Recently installed Spectra Multi-Quad RGA

Stainless Steel Process Chamber is 134" (3330 mm) long x 11.25" (285 mm) x 40.5" (1030 mm)

 

Load and Unload Chambers are 31.5" (800 mm) long flange to flange (inside valves) x 11.25" (285 mm) x 40.5" (1030 mm)

               

VAT Gate Valve opening is 7.75" x 35.25" (200 x 900 mm)
VAT Gate Valve Body is 4" Thick (100 mm)
Chambers Interior Cross-Section = 11.25" x 40.5" (285 x 1030 mm)
Cathode Doors:
Currently Installed Cathodes have Targets 5" x 25", but these can be much larger larger as you can see in images.
* Note:  Assembling L + UL Chambers together as the single load-lock, with two middle valves left in place, gives enough length to load/unload up to 1650mm (65") x 650 (25.6") panel.

DEPOSITION:
MAGNETRONS: Two DC Magnetrons, and MDX supplies provided
(Space in process chamber for a third magnetron.
TARGETS: Target size is 24" x 4" (600x100 mm)
SUBSTRATE PALETS: Current Substrate Pallet size is 27" x 27"

VALVE CONTROL SYSTEMS: (6) RVG 040
GAGES:
(3) PKG 100 Pirini Cold Cathode Gauge Controls,
IMG 060B Log/Lin Ion Gauge Control,
TPG 100 Multi Pirani Meter,
RTA 101 Rate/Time Adder,
(3) NLC 102B Nitrogen Level Controls,

GENERAL:
MANUALS: Included.
CONDITION: - Lightly used, "Sparkly Clean".

Very Large Substrate (or many small ones) up to 8x4.5 feet
12-ChamberDeposition System from BP Solar for Production Coating
Isolation valves between every chamber.
Proven in Industry: Use for CVD, PECVD, PVD, Sputter ... and others
Substrates ... up to 8x4.5 feet (2420x1370mm) .. as you wish
- Valves and Chambers by GNB
- Current Carrier Panel Size set for 650x1250mm
- Save Expense (Stainless now up 400%) and delivery time (as long as 1 year) to be up and manufacturing panels for your market.
- A solidly executed system for coating large (up to 8x4.5 feet) flat panels and by means of PVD and/or CVD deposition
- Corporations which participated: 
Chambers and slit valves by GNB.  Purchased by Solarex, acquired by BP Solar which, in "Big Wheel" Corporate Irony, shut the plant down just as the managers stated the process was yielding superior product, and as we now know, at the exact bottom of the demand for PV panels a few years ago. We present, therefore, your opportunity to purfchase this unique and capable system foundation at a great price: 
- Chambers and Valves Delivered Completely refurbished to spec by GNB

       

GENERAL COMMENT:
This well constructed chamber system with two paralell transport paths, 4" x 64" slit valves at each chamber junction, low leak rate, fully controllable valves, symmetrical design with double sided doors, and large interior width, is the basis of a production sputter or PECVD coating system with very good vacuum and mechanical performance operating at 0.1 mTorr and higher. Substrates as large as 4.5'x 8 can be mechanically transported and processed.

WHAT IS INCLUDED
1 atmospheric Mechanical Load station
12 stainless vacuum chambers, each handling two panels up to 8x4.5' feet/each
2 atmospheric cooling stations, and
1 atmospheric Mechanical Unload station.
2 carrier return systems for transporting carriers from the unload area back to the load area
10 Gas Control Cabinets
30 Carriers 57.5"h x 80"
Festo Pneumatic Manifolds, and many other parts, components and subsystems

  

CHAMBER DESCRIPTION AND SPECIFICATION (each of 12 chambers):
LEAK RATE = Better Than 10-9 scc/sec He (standard GNB spec)
Interior: W = 20" (frame-to-frame), H = 67.75", L = 96"
Door-Door inside W = 22"
Door Opening = 68.00" x 84"
Door Dimensions = 75.75" x 92"
Interior Vertical Height Clear of Transport = 60"
Material = 304L
SLIT VALVES = 4" x 64" (manufactured and serviced by GNB, Sacramento, CA)
CARRIER TRANSPORT IN VACUUM
Two separate carrier transport systems with track paths centered 5.25" from inner surfaces of each door, and 11.5" apart.
There are 5 drive pulleys per track in each chamber, spaced 19" apart ,
SUPPLIED CARRIERS (may be modified for other panel sizes):
Usable Area = 57.5"h x 80"w, Overall = 61.5"h x 80"w, Quantity = 30

SUBSTRATE TRANSPORT:
Dual side-by-side substrate carrier transport paths 11.5" apart,
friction drive via pulley on bottom of chamber,
carrier stabilized by roller bearing guides at top of chamber
Ferrofluid drive feedthroughs through bottom of chamber.

PROCESS GAS MANAGEMENT CABINETS:
Included are 10 Gas Cabinets, each with Mass Flow Controllers programmed by a PLC to control the introduction of gases to the process chambers.

WHAT IS YOUR APPLICATION ?
We have affiliates prepared to quote a system to satisfy your process needs,
and consultation in new designs in
PVD, PECVD, LPCVD, Cold Wall PECVD, and Atmospheric Pressure CVD.

Hypothetical TWO ATMOSPHERE SPUTTER PROCESS SEQUENCE (using 10 chambers):
0 - CARRIER LOAD Load Station (atmosphere)
1 - LOAD-LOCK Chamber 1
2 - BUFFER CHAMBER Chamber 2
3 - HEAT/PLASMA CLEAN Chamber 3
4 - PROCESS a Chamber 4+5
5 - BUFFER Chamber 6
6 - PROCESS b Chamber 7+8
7 - COOL/BUFFER Chamber 9
8 - UNLOAD LOCK Chamber 10
9 - CARRIER UNLOAD Unoad Station(atmosphere)

LARGE VACUUM LAMINATORS FOR SOLAR PANELS

LARGE VACUUM LAMINATORS for panels up to 2200x3400mm - (click for more pictures and discription!) ZHUHAI BAIXIN MACHINERY CO., LTD.: PV Panlel large area vacuum laminators. (stock photo left) 3 systems manufactured late 2006 and mid 2007. Model CYY-A3400DG (Earlier revision requires replacement of oil heating unit which was susceptable to fire) Model CYY-A2234DG (Later, but identical laminator, updated subsystems) Laminating area = 3.4 x 2.2m Laminating temperature, max = 160C Overall System 11.5m long x 2.7m wide ZHUHAI BAIXIN Product Web Site Vacuum pumps supplied by customer.

New Prices ? DON'T ASK ! Ours ? Please Call

SPUTTER COATING SYSTEMS summary:

If you are considering a sputter coater with 15" to 40" targets, you are also aware of the fact that the chamber systems can cost $1- 7 million when new, and the pump packages may run as high as $4 million, and you will also be aware that the the facility to accommodate the system will be expensive, and that the cost of installation and code-approved facilities will also be high.

To save time and expense, LMDC will contribute its efforts in all ways possible to help you minimize this expense.
One of the ways we can do this is to refer technical and scientific manpower experienced with these specific systems to you.
LMDC maintains a list of Engineers and Consultants for your assistance worldwide.  Please feel free to inquire.

CONSULTING and ENGINEERING:  THIN FILM DEPOSITION PROCESS TECHNOLOGY
* Need Process Consulting ? Feasability Information ? PECVD ?, Sputter and PVD ? 
* Not sure if the equipment on this web page will do the job you require ?
* Want a Smooth Installation? - Professional PhD Trained Scientists and Engineers are available to direct and train your team.
* Please inquire for pricing and details of scheduling and availability of Engineers and Consultants

CPA / Kurdex /General Signal V2000,
Four process chambers. Double Sided Deposition
5 Magnetrons and Targets on EACH side, Water Cooled
Targets - 5" x 21" - 2 Chrome and 8 Copper
Each target Can take up to 10Kw per target, depending on procss definintion.
CARLTON Load / Unload Magazines for fault-free production
Supported - Parts and Service readily available




CPA / Kurdex / General Signal,
Two process chambers.
Four Cathode Positions on each side
Accepts CPA Magnetron Cathodes with 21" targets

6.75" Wide Roll to Roll Vacuum Bell-Jar Deposition Setup
(E-Beam or Sputter): IDEAL FOR RESEARCH !

ROLLER TRANSPORT SYSTEM: (End-On View), (Side View), (Rear View), (Drive Mechanism)
The Eight Rollers are each 6.675" long by 3" in diameter.
Two have encoders or tachometers.
Two are idlers,
Two are driven take-up and supply reels with removable cores.
One set for tensioning, and is driven
     
       

 

DOUBLE-SIDED DEPOSITION :
The deposition sources, on closer inspection, look more like RF diode sputter backing plates,
and as you can see, there are two coax semi-rigid cables to them.
CHAMBER:
Interior is about 28" high x 26" wide, SS, water-cooled, with O-ring seal.
Three 6" viewports with 4" clear apertures.
Throttling gate valve in base, followed by cryo.



PUMPS: Leybold RPK1500 8' Cryo Pump (photo image), Leybold D30 Mechanical Pump
COLLAR: 1" ports in 16 positions, plus the three DC servo motor drive shaft sealed coupling ports. (image)
HOIST: Torr-Vac Model 500 motor hoist with Electronic Controls.
INSTRUMENTATION: (Image a, image b, image c)
Inficon XTC Deposition Monitor
GP Model 280 Ion Tube Vacuum Gage,
Barber Coleman 590 Controller (photo image)
SUBSTRATES: Any 4-6" width material on rolls - Mylar, Cloth, Foils.
HOIST: Torr-Vac Model 500 motor hoist with Electronic Controls.
INTERLOCK & CONTROLS: Torr-Vac
FOOTPRINT OF SYSTEM: 3' x 5'
PRICING: System as-is with no e-beam or other source) $27K ,
     or
REQUEST A QUOTATION Rebuilt, guaranteed operational, E-beam or Sputter, and Cryo or Turbo.


VACUUM CHAMBERS & VACUUM OVENS:

Two Exceptional Large Rectangular Vacuum Chambers:
* Impeccible Qulity, All 304 ElectroPolished Stainless Construction throughout.
* Manufactured by Ulvac in Japan * Includes PolyCold fast cycle coils on interior wall.
* Thermally Insulated on all sides and doors
* Water Coils On all sides and Doors for cooling or heating
* Clad with Hi-Polish, Attractive ElectroPolished Stainless Skin
* Many Viewports * On Stands for convenient working height.
* Sliding Door on EACH End. Convenient for pass-through processes.

Chamber 1: Interior = 132" deep x 35" wide x 44.5" tall (actual not "nominal")
Volume = 119 ft3, 206K in3, 3.37m3 3 units Price on request
Chamber 2: Interior = 94.5" deep x 41" wide x 64" tall (actual, not "nominal")
Volume = 143 ft3, 248K in3, 4.05m3 1 unit Price on request

We are very impressed by this beautiful work !
Chambers include ceilng ports for ASA-10" Cryo Pumps !
Applications include Freeze-Drying in GMP pharmaceutical applications (Lyophilization),
Evaporative coating of large objects.
HV storage, testing and
solar simlation of deep space.

Stainless Steel Water Cooled Bell Jars
(several sizes - please ask)
18D" x 28H" interior, viewport and other openings

Pyrex Bell Jar and 15 port Collar
18D" x 24H" Belljar image, Collar image Used, Good $795

Comptech/Alcatel High Vacuum Long Tube Processing Oven
Ultra-Clean processing and bakeout of long tubes to 88" long x 10" dia.
(laser, rf, and other electron beam tubes of all types)
Unique opportunity to purchase this $100,000 plus chamber system in excellent condition.
(just the stainless chambers - including nothing else - cost more than this to fabricate)
Laser, RF, and Electron Beam Tube Vacuum Processing dual chamber bakeout oven:
For Tubes, Accelerators, etc. up to 88" long x 10" dia. (up to 8 tubes at a time in each chamber)
Exterior length is 7'5"
8 separate UHV fittings & flanges for backfill and oven.
Evacuated Oven: prevents oxidizing thin wall seals.
Vacuum Oven Bakeout up to 450 C.
Horizontal Clamshell Design for very easy handling.
No hoists or high ceilings required.
All Stainless construction. Beautifully welded. Just add Sorption, Cryo, Turbo and roughing pumps.
Dual Chambers: Process up to 16 tubes simultaneously.
If you process longish tubes, this is a tremendous money-saver and a "must- purchase"
(photo image)

VACUUM PUMPS

WARRANTY on REBUILT Pumps:
Rebuilt pumps have had all seals and wearing parts replaced, and are tested to meet specifications.
For Non-Corrosive service, Pumps are guaranteed for 120 days after delivery.
For Corrosive service, with process contamination, (smell can be a clue) Pumps are warrantied for 30 days only. Cleaning charge remains obligation of user/purchasor.
All warranties are for refund or replacement at LMDC's discretion.
Our Goal= Satisfied Users !

DRY PUMPS: ("S" = Prepared for corrosive gas service)
Edwards ESDP30A Scroll Pump 30m3/hr (17cfm) to 15microns
Leybold M100S(corrosive gas)Dry Pump,100m3/hr.($39K)unused
Leybold M 50S Dry Pump, 50m3/hr.($27K)unused
Ebara 50X20UERR Serial # FK235331/3 127CFM, 4mTorr
Ebara 40X20UERR Serial # DPA 924569 42CFM, 30mTorr
Edwars QDP 80 w/ QMB500 on frame with control box - Just in!!
Balzers DUO250 Two Stage pump.

DRY PUMP STACKS:
Edwards EH1200 on EDP300, water cooled, beautiful !
Leybold WSU151 on M50S, unused 153 into 50 M3/hr
Alcatel DRYTEL MICRO Turbo (rebuilt) on Dry Mechanical pump

WET PUMP STACKS:
Balzers DUO250 + WKP1000 Stack, 1000m3/hr., used, maintained in spares inventory for very large sputter system. $17.9K
Edwards E1M275 + EH1200 Stack $14.9K
Leybold E250 + WAU1001US Stack $18.8K

WET PUMPS:
Edwards E1M275 $ 8000
Edwards E2M175 $ 6000
Edwards E2M40   $ 2500

Leybold E250 250m3/hr (150cfm) to 20 microns 2) $ 9900
Leybold E150 150m3/hr (100cfm) to 0.20micron 1) $ 4900
Leybold D40BCS + filter acces, Fomb ,Rebuilt, Guar. $ 3900
Leybold D30AC Rebuilt. Guar. $ 1500
Leybold D8A Rebuilt. Guar. $ 1100

Welch 1398 51CFM, dual stage, 1 micron/3HP/3ph, rebuilt $ 3400

OILLESS PUMPS:
Busch RC0063C, 41CFM, 15torr
Busch RC0063E, 41CFM, 15torr

ROOTES BLOWERS:
Edwards EH2600 Rootes, 1200ft3/sec, Fomblin, Rebuilt and Guar. $ 9800
Edwards EH1200 Rootes, 1200ft3/sec, Fomblin, Rebuilt and Guar. $ 6600
Leybold WAU1001US Rootes Blower, $ 4900
Leybold WSU151 Rootes Blower, Fomblin, Rebuilt and Guaranteed $ 3500

MASS SPECTROMETERS

Alcatel 5150 CP Pump, + Control Unused
Pfeiffer TPH 521/TCP 350 Pump +  Control ISO 100 flange, New
Leybold TMP1500 Pump, rebuilt, ceramic, ISO250
Leybold TMP1500 Pump, UNUSED + Used Controller
Leybold TMP 360 Pump, rebuilt, ceramic, UHV + Controller
Leybold TMP 150 Pump rebuilt, ceramic, UHV + Controller
Leybold TMP 151 Used, Ceramic
Leybold TMP 50 Pump rebuilt, fan, UHV flange.
OSAKA TP3213M Maglev Wide Range (from 2 torr) Pump KF40/ISO320
+ Control & Cable (NEW in original manuf. crate)
OSAKA TG2003M Maglev Wide Range (from 2 torr) Pump,
12 bolt ISO250 flange + TD2001 Control, 30'Cable, used, "EX+" (long lived pump!)
OSAKA TG1300 Wide Range (from 2 torr) Pump
OSAKA TG 553 Wide Range (from 2 torr) Turbo Pump, rebuilt
SHIMADZU TMP-3003LM Pump +  Control MagLev 3000L/S, 2 month old Japan
Factory bearing upgrade and complete rebuild. Just as new (4)
VARIAN V200 Turbo Pump + Control
VARIAN TV551/ISO160 Turbo Pump + Turbo-V 550 Controller

Flexible Helium Lines. 10' length, guaranteed

Flexible Helium Lines. 20' length, guaranteed

*A note about APD products: In our experience, Helix / CTI makes excellent cryo systems,
and we are aware of the brand-name dominance acheived by CTI's rapid turn-around service
in the current vacuum equipment marketplace.
* With this in mind, and with great care, we questioned the experiences of users in a large
manufacturing company using about 200 cryo pumps in production. They have a mix of
about 25% CTI pumps, and 75% APD Cryo Pumps. Technicians as well as Maintenance and Process
Engineers stated without hesitation their opinions that the APD pumps and compressors performed
over the long haul: "BETTER - more reliably, with less down-time and faster pump speeds - than
the equivalent CTI systems". These opinions may result from "cognative dissonance", excellent
PM procedures, or perhaps they are scientifically accurate. Please draw your own conclusions.
* If it is service you need - - our APD pumps are priced low enough to
buy an extra for on-site spares, and STILL be ahead of the game, financially speaking !!

CTI On Board 8F
CTI CT-8 ASA
CTI CT-8 ISO
CTI On Board 8F
CTI CT-10

CTI 1020R Compressor
CTI 8500 Compressor
CTI 8510 Compressor (for onboard pumps)
CTI 9600 Compressor
Leybold RW3 Compressor
Ebarra 4.8 Compressor: For up three CT8, or one CT10/APD-12SC
*uses Hitachi compressor module, as does CTI
Ebarra 12" Cryo Pump, used, ASA
Ebarra 8" Cryo Pump, used, ASA
Ebarra 4" Cryo Pump, used, ASA

ION PUMPS and POWER SUPPLIES:
Supply - Varian "Star-Cell" Ctl/Pwr Unit Model 929-0081 (unused)
Supply - Varian / Duniway 921-0062 power supply cable
Pump - Ultek 600lps, 12" conflat flange, magnets included
Supply - Ultek Digitel 500

SORBTION PUMPS:
Varian Megasorb 931-5012 MODE = "Bake" / "Auto" / "Manual" Pneumatic Valves.
"BAKEOUT CONTROL", "BAKEOUT TIMER", "AUTO CONTROL".
This is THE very large unit mounted on wheels.
The stainless LN2 Canister is itself 15" in diameter, 33" tall.
Includes LN2 Controller, Air pressure regulator and all Varian controls.

DIFFUSION PUMPS

VACUUM VALVES

POPPET VALVES:

40mm Varian model NW-40,
Right Angle KF40 flange, pneumatic poppet valves. Clean, good condition

30mm Leybold 29721,
Right Angle KF30 flange, pneumatic poppet valves. Clean, good condition

SLIT VALVES:

VAT F02/03 Series for 12" wafers and flat panels
Aperture: 335x32mm / (13 3/16"x 1 5/16"),
Body: 90x115x410mm/ 4.5"x 16.125"x 3.5"
These are top of the line valves with replacable seals,
bi-directional sealing to 1.2bar,
for load-lock or interchamber applications,
designed for systems working down to the lowest of O-ring pressure levels (approx. 10-6)
( Front ) ( Rear ) ( Top ) - limited quantity


GATE VALVES:

ASA 12" HVA 11000 series 12" pneumatic Gate Valve - used -
All Stainless Construction (Fits CT-10 and APD-12 Cryo pumps).

VAT F64 Series Servo-Controlled Gate/Throttle Valves - All Stainless, beautiful !
F64 series valves are designed to be used open, closed, or servo positioned to any point in between.
deal to either throttle or isolate pumps such as cryos and turbos for process control in plasma, sputter
or any system requiring pressure or flow control.
(Supplied with Pneumatic drive, unless step-motor is substituted with PM5 controller option)

DN200MM ISO-F (100 units)  F64 series gate/ throttle valve
DN250MM ISO-F (  30 units)  F64 series gate/ throttle valve
(300mm) ASA10" (08 units)  F64 series gate/ throttle valve (bolts to APD-12 / CT-10 Cryo)

VAT VALVE CONTROLLERS

VAT PM-5 Adaptive Pressure Controller for F64 Series valves.
Allows remote computer or local front panel control of your valving.
Includes Step-Motor Drive Module
Requires a cable with Burndy 12 contact round shell connectors. $1950

VAT PM-7 Adaptive Pressure Controller for Pendulum valves.
Allows remote computer or local front panel control of your valving.
Includes Step-Motor Drive Module
Requires a cable with Burndy 12 contact round shell connectors. $2650

Flange Adapte  r from 200 ISO-F to ASA-12" $ 575

Comptech / Alcatel Hi-Vacuum "Vari-Q" Throttling Valves,
Sizes = 3", 80mm, 100mm, 160mm NEW, UNUSED UNITS!:
For sputter systems, LPCVD, Pressure Controls, etc.
these valves are the circular pie shaped Venetian blind type with a 90 degree rotation 0.25" shaft.
Easily controlled remotely with a simple, low cost step-motor.
Special Teflon coating for corrosion resistance, as in CVD work.
All are UNUSED in original manufacturer's packaging.   

DC Magnetron and Ion source POWER SUPPLIES

ADVANCED ENERGY "RF/DC Combiners" model 6016-001-B
This unit allows energy from an MDX series supply ("C" twist-lock connector) to be combined with energy from an RF supply ("N" connector) and presented together at the output ("UHF" connector) from which it leads to the magnetron cathode.
Six units, new condition

ADVANCED ENERGY "Pinnacle" SERIES
DC Magnetron Power Supplies
The "Pinnacle" is the most recent evolution of the AE DC Magnetron Supplies. Major advantage is the low, low stored energy which is discharged into the substrate when arcs take place. Arc energy in the Pinnacle is approximately two orders of magnitude less than MDX amd MDX-L series. Like with the MDX-L series, you get 12-18kW per small 7" high, 19" rack mount unit. In a 6' high rack cabinet, you can mount 8 units for a conservative total of 96kW with the popular 12kW units.° Low stored energy
° wide impedance range with no taps
° compact design
° extensive arc management capability
° flexible interfacing
° high ripple frequency
° CE compliant.
° Magnetron sputtering, DC biasing, Reactive sputtering
Dual Output Pinnacle Supplies: Model MN3152412-106. Refurbed $12K/ea.

ADVANCED ENERGY "MDX" SERIES DC Magnetron Power Supplies
° world's most flexible and popular DC supply ! Independently Control DC CURRENT, VOLTAGE, or POWER
° INPUT = Y or Delta 208 V ±10%, 3 phase, 50/60 Hz,
° Microprocessor Control, Arc Suppression,
° USED, TESTED, GUARANTEED !

AE MDX-10K 10KW (Blank front panel) $ 5750
AE MDX- 5K    5KW (Blank front panel) $ 1950

AE MDX-5000 5KW (Master with full front panel) $ 4350
AE MDX- 500 500W (Master with full front panel) $ 1590


ADVANCED ENERGY "MDX-L" SERIES DC Magnetron Power Supplies
USED - TESTED BEFORE SHIPMENT - GUARANTEED
- world's most flexible and popular DC supply ! A redesigned and updated version of
the venerable and popular MDX, which has become the industry standard.
° Lower stored energy for arc suppression than original "MDX".
° The MDX-L series of supplies is extremely easy to use and lowest in cost .
° All that is required is analog input control signals 0-10VDC
to control output POWER, VOLTAGE, or CURRENT. Likewise,
° three buffered precision analog outputs (0-10VDC) "POWER" , "VOLTAGE", and "CURRENT" in real time.
° Use $30 DC Digital Panel Meters and inexpensive "volume control" potentiometers for full control and status display.
° Use low cost DAC and ADC boards in a single PC to control your entire system.
° Attach up to two slaves to each master with one cable each for power up to 54kW.
° USED, TESTED, GUARANTEED ! QUANTITIES AVAILABLE !

Input Power: 200-208vac 50/60Hz, "Y" or Delta (no neutral connection required).
L-6 = 25A. L-12 = 50A, L-18 = 75A (per phase leg)
Power factor = 0.9 for output power 10-100% of maximum

MDX L-6 L-12 L-12/650 L-18
Control Ranges
CURRENT 0-15A 0-30A 0-24A 0-45A 0-10VDC
VOLTAGE(-) 0-525V 0-525V 0-650V 0-600V 0-10VDC
POWER 0-6kW 0-12kW 0-12kW 0-18kW 0-10VDC
Regulation: 0.2% from 10 to 100% of output range.
Repeatability: 0.2% from 10 to 100% of output range.
Power Accuracy: 1% of setpoint or 12/24/36W, whichever is greater.
Voltage Accuracy: 1% of setpoint or 2V, whichever is greater.
Variable Ramp-Up: 50 - 1000 ms with 0-10VDC control input.
Output Connector: UHF (RG8 cable recommended)
Voltage Ripple: 5% rms, maximum.
Ignition Voltage: 1500V / 60ma
Arc Shutdown: 8ms

MDX-L SUPPLIES -TESTED BEFORE SHIPMENT - GUARANTEED
model,           description,                            price,  (qty.), "as-is"
AE MDX-L 6    6KW Stand-alone/Slave     $ 2300 ( 4) $ 700
AE MDX-L12 12KW Stand-alone/Slave    $ 3800 (20) $ 900
AE MDX-L12-650 12KW S-A/Slave 650V $ 3900 ( 6) $ 950
AE MDX-L18M 18KW Master                      $ 6900 ( 8) $2000

ENI DCG series - DC Magnetron Power Supplies
HIGH RESOLUTION CONTROL OF POWER, VOLTAGE AND CURRENT

ENI DCG-100 5KW (front panel - full controls) $ 4900
ENI DCG-100 5KW (front panel - blank ) $ 3900
ENI DCG-100 10KW (front panel - full controls) $ 7900
ENI DCG-100 10KW (front panel - blank ) $ 5900
ENI DCG-200 20KW Master(front panel - blank ) $ 9900
ENI DCG-200 20KW Slave (front panel - blank ) $ 7900

50 Ohm:   Highest Quality RG217/U (teflon) and other Co-Ax Power Cables
 
With TruConnector SQS and 7/16 quick disconnect connectiors at large price savings.
Used with RF and DC Magnetron Sputter Supplies, PECVD, Ashers,
and many other tools with quality and reliability designed in.

These are the super-premium RF interconnect cables demanded by the semicunductor industry. To avoid unintended arcing, failure, and poor performance caused by incompletely connected cables in high power systems, Applied Materials called upon TruConnector to design a completely new series similar in design to quick-disconnect high pressure air connectors. These cables are the result.  There are two states: "CONNECTED" and everything else. RG-217/U

RG-217/U N - N 28' New 110 $ 49/ea

RG-217/U N - N 50' New 16 $ 69/ea
RG-217/U HN - HN 100' New 6 $129/ea
RG-217/U HN - HN 50' New 16 $ 99/ea

RG-217/U HN - N 100' New 16 $129/ea
RG-217/U HN - N 50' New 6 $ 79/ea

RG-217/U 7/16 -7/16 100' New 4 $179/ea
RG-217/U 7/16 - HN 100' New 4 $159/ea

RG-217/U SQS - SQS 100' New 3 $325/ea
RG-217/U SQS - SQS 50' New 6 $250/ea
RG-217/U SQS - 7/16 100' New 4 $250/ea

notes:
QDS = "Quick Disconnect Series" from TRU-CONNECTOR Electrically equivalent to "C" (bayonet) & "SC" (screw)
SQ = "Super Quick Series" from TRU-CONNECTOR 10kV, up to 5kW, positive mating indication.

Veeco Type SDM Ion-Beam Source Gun $3395
A traditional high-end gun for research (view front, rear, side)
Cathode Heater 4V at 30A = 120 watts
Total Beam Current 20 - 300 microamps
Energy Dispersion Less Than 40 eV
Phase space Surface at 10KeV: less than 10-4 rad.m.
Half Angle Divergence 0.02 radian
He Gas Flow: 5 x 10-3 torr l/sec
Max Power: 1.5kW
PRICE = $3395

VACUUM INSTRUMENTATION & GAGES

THERMOCOUPLE Veeco TG70 Controller With Sensor, USED, GUAR. $395

MKS BARATRON 625A-13547 10.0Torr KF Flange Transducer + 2 trip points USED, GUAR. $970
±15 VDC power supply 0-10 VDC output D-15 Connector
MKS BARATRON 627A-13258 0.02Torr KF Flange Transducer USED, GUAR. $990
±15 VDC power supply 0-10 VDC output D-15 Connector

Granville-Phillips Model 316 Gage Controller set up, with three cables,
for Convectron Gages, UNUSED $1150

MKS Model 651-CD2S1N Throttle Valve Controller

MASS FLOW CONTROLLERS

QTY MFG MODEL RANGE CAL. RATIO PRICE

4 STEC SEC-4400MC-UC 2 SLM Ar 1.420 $ 699
4 STEC SEC-4400MC-UC 20 SCCM SiH4 0.600 $ 599 (photo)

7 UNIT UFC-1000HP 200 SCCM CCl4 0.306 $ 499
1 UNIT UFC-1020 20 SCCM O2 0.981 $ 499
1 UNIT UFC-1020 50 SCCM O2 0.981 $ 499

Applied Materials AMAT Spare parts and assemblies. Price and Availability: PLEASE CALL

Centura/Endura Robot Upper/Lower Assy.
0010-70149
0010-70317
0010-70264
0010-75533
0010-01711
0010-76061
0010-70265
0010-40310

Misc Appied Part Numbers
0190-77181
0090-77000
0090-77001
0090-77007
0010-01191
0150-35746
0190-35961
0190-00220
0190-35780
P5000 RF Match
0010-20524

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ROGUE'S GALLERY of interesting process and research gases,
Acetylene through Xenon (via the Freons): (some information derived from Unit,Inc.charts)
Note: Nitrogen by definition has a VOL FLOW RATIO of 1.000

NAME     GROSS FORMULA        VOL FLOW RATIO
-----------------------------------------------------------
Acetylene C2H2 0.595
Air            1.001
Allene C3H4 0.434
Ammonia NH3 0.719
Argon Ar 1.420
Arsenic Pentafluoride AsF5 0.33
Arsine AsH3 0.673

Boron Tribromide BBr3 0.378
Boron Trichloride BCl3 0.450
Boron Trifluoride BF3 0.508
Bromine Br2 0.808
Bromine Pentafluoride BrF5 0.256
Bromine Trifluoride BrF3 0.385
Bromotrifluoroethylene C2BrF3 0.289
Bromotrifluoromethane (Freon-13b1) CBrF3 0.370
Butadiene,1,3- C4H6 0.283
Butane,n- C4H10 0.261
Butene (1-Butene) C4H8 0.299
Butene (Cis-2-Butene) C4H8 0.323
Butene (Trans-2-Butene) C4H8 0.292

Carbon Dioxide CO2 0.739
Carbon Disulfide CS2 0.603
Carbon Monoxide CO 1.000
Carbon Tetrachloride CCl4 0.306
Carbon Tetrafluoride (Freon-14) CF4 0.420
Carbonyl Fluoride COF2 0.543
Carbonyl Sulfide COS 0.66
Chlorine Cl2 0.858
Chlorine Trifluoride ClF3 0.402
Chlorodifluoromethane (Freon-22) CHClF2 0.459
Chloroform CHCl3 0.392
Chloropentafluoroethane (Freon-115) C2ClF5 0.242
Chlorotrifluoromethane (Freon-13) CClF3 0.383
Cyanogen C2N2 0.451
Cyanogen Chloride ClCN 0.606
Cyclopropane C3H6 0.458

Deuterium D2 0.997
Diborane B2H6 0.441
Dibromotetrafluoroethane (Freon-114b2) C2Br2F4 0.158
Dichlorodifluoromethane (Freon-12) CCl2F2 0.354
Dichlorofluoromethane (Freon-21) CHCl2F 0.421
Dichlorosilane SiH2Cl2 0.416
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4 0.223
Difluorochloroethane (Freon-142b) C2H3ClF2 0.300
Difluoroethane (Freon-152a) C2H4F2 0.377
Difluoroethylene (Genetron-1132a) C2H2F2 0.427
Dimethyl Ether C2H6O 0.390
Dimethylamine C2H7N 0.371
Dimethypropane,2,2- C5H12 0.217
Disilane Si2H6 0.318

Ethane C2H6 0.482
Ethanol C2H6O 0.392
Ethyl Acetylene C4H6 0.322
Ethyl Chloride C2H5Cl 0.389
Ethylene C2H4 0.597
Ethylene Oxide C2H4O 0.535
Fluorine F2 0.931
Fluoroform (Freon-23) CHF3 0.503
Freon-125 C2HF5 0.247
Freon-134a C2H2F4 0.265
Freon-500 Freon - 500 0.352
Freon-502 Freon - 502 0.343

Germane GeH4 0.570
Germanium Tetrachloride GeCl4 0.267
Germanium Tetrafluoride GeF4 0.314

Halothane C2HBrClF3 0.247
Helium He 1.420
Hexafluoroethane (Freon-116) C2F6 0.241
Hexafluoropropylene C3F6 0.347
Hexane C6H14 0.179
Hydrazine N2H4 0.517
Hydrogen H2 1.010
Hydrogen Bromide HBr 0.999
Hydrogen Chloride HCl 0.988
Hydrogen Cyanide HCN 0.764
Hydrogen Fluoride HF 1.001
Hydrogen Iodide HI 1.000
Hydrogen Selenide H2Se 0.789
Hydrogen Sulfide H2S 0.802

Iodine Pentafluoride IF5 0.249
Isobutane C4H10 0.264
Isobutylene C4H8 0.285

Krypton Kr 1.431

Methane CH4 0.722
Methyl Acetylene C3H4 0.423
Methyl Bromide CH3Br 0.583
Methyl Chloride CH3Cl 0.630
Methyl Fluoride CH3F 0.685
Methyl Mercaptan CH3SH 0.518
Methyl Vinyl Ether C3H6O 0.333
Methylbutene,3- C4H10 0.265
Molybdenum Hexafluoride MoF6 0.213
Monomethylamine CH5N 0.512

Neon Ne 1.431
Nitric Oxide NO 0.978
Nitrogen N2 1.000
Nitrogen Dioxide NO2 0.737
Nitrogen Tetroxide N2O4 0.332
Nitrogen Trifluoride NF3 0.480
Nitrogen Trioxide N2O3 0.391
Nitrous Oxide N2O 0.710

Octafluorocyclobutane (Freon-C318) C4F8 0.157
Oxygen O2 0.981
Oxygen Difluoride OF2 0.633
Ozone O3 0.698

Perchloryl Fluoride ClO3F 0.395
Perfluoropropane C3F8 0.165
Phosgene COCl2 0.444
Phosphine PH3 0.690
Phosphorus Oxychloride POCl3 0.302
Phosphorus Trifluoride PF3 0.437
Propane C3H8 0.358
Propylene C3H6 0.411

Radon Rn 1.431

Silane SiH4 0.600
Silicon Tetrachloride SiCl4 0.284
Silicon Tetrafluoride SiF4 0.348
Sulfur Dioxide SO2 0.687
Sulfur Hexafluoride SF6 0.258
Sulfur Tetrafluoride SF4 0.346
Sulfuryl Fluoride SO2F2 0.388

Tetraethylorthosilicate (TEOS) Si(C2H5O)4 0.081
Tetrafluoroethylene C2F4 0.319
Tetrafluorohydrazine N2F4 0.324
Tetramethylcyclotetrasiloxane (TMCTS) C4H16Si4O4 0.085
Tin Tetrachloride SnCl4 0.257
Titanium Tetrachloride TiCl4 0.206
Tribromoethane CHBr3 0.374
Trichloroethane (TCA) C2H3Cl3 0.278
Trichlorofluoromethane (Freon-11) CCl3F 0.329
Trichlorosilane SiHCl3 0.340
Trichlorotrifluoroethane (Freon-113) C2Cl3F3 0.203
Triethylgallium (TEGa) (C2H5)3Ga 0.167
Trimethylaluminum (TMAl) (CH3)3Al 0.165
Trimethylamine C3H9N 0.279
Trimethylarsenic (TMAs) (CH3)3As 0.164
Trimethylborate (TMB) (CH3O)3B 0.203
Trimethylgallium (TMGa) (CH3)3Ga 0.167
Trimethylphosphite (TMPi) (CH3O)3P 0.180
Trimethylphosphorous (TMP) (CH3)3P 0.257
Tritium T2 0.985
Tungsten Hexafluoride WF6 0.217

Uranium Hexafluoride UF6 0.196

Vinyl Bromide C2H3Br 0.462
Vinyl Chloride C2H3Cl 0.478
Vinyl Fluoride C2H3F 0.497

Water Vapor H2O 0.817

Xenon Xe 1.431